What is the spatial resolution of the COXEM CX-300 SEM?

The CX-300 achieves a spatial resolution of less than 3 nm, making it suitable for high-resolution imaging of nanoscale structures and surface features.

What is the maximum magnification of the CX-300?

The CX-300 offers magnification from 9x up to 500,000x, covering a wide range of analytical needs from macro-scale overviews to nanoscale detail.

Can the CX-300 image non-conductive samples?

Yes. The CX-300 supports Low Vacuum (LV, 20 Pa) and Variable Pressure (VP, 10/20/30 Pa) modes, allowing imaging of non-conductive or beam-sensitive samples without sputter coating.

What EDS detectors are compatible with the CX-300?

The CX-300 is compatible with EDS detectors from Oxford Instruments and Bruker, enabling elemental analysis alongside high-resolution imaging.

What is the sample stage travel range of the CX-300?

The motorized 5-axis stage offers X: 100 mm, Y: 100 mm, Z: 60 mm travel, with 360 degree rotation and -20 to 90 degree tilt.

Where can I buy the COXEM CX-300 in Europe?

The CX-300 is available exclusively through Utrecht Instruments, the authorised European distributor for COXEM. Contact us for pricing, demonstrations, and application support.

CX-300 (Full-size SEM)

Full-Size SEM — CX-300 The CX-300 is a full-sized Scanning Electron Microscope designed for large-area analysis. Featuring the intuitive NanoStation5 GUI, it offers easy and efficient operation.

Full-Size SEM — CX-300

The CX-300 is a full-sized Scanning Electron Microscope designed for large-area analysis. Featuring the intuitive NanoStation5 GUI, it offers easy and efficient operation. With a maximum magnification of 500,000×, sub-3nm resolution, and an expanded chamber that accommodates larger samples, the CX-300 sets a new standard for powerful yet accessible microscopy across research and quality control applications.

Key Applications

Large-area sample analysis and inspection
Advanced materials research and characterisation
Failure analysis and defect detection
Semiconductor and electronics inspection
Pharmaceutical and life science research
Industrial quality control

Essential Features

Sub-3nm Resolution

Spatial resolution below 3 nm with magnification up to 500,000× for fine structural detail.

NanoStation5 GUI

Intuitive, user-friendly interface for fast, efficient operation — minimal training required.

Expanded Chamber

Accommodates larger samples with a 100 × 100 mm stage and full 360° rotation.

5-Axis Motorized Stage

X/Y/Z translation plus 360° rotation and -20° to 90° tilt for full sample orientation control.

Multiple Vacuum Modes

HV, LV (20 Pa), and VP (10/20/30 Pa) modes for a wide range of sample types.

High-Capacity Vacuum System

300 L turbo pump combined with 100 L rotary pump for stable, fast pump-down performance.

Software Features

Panorama v2
Auto Focus
1-Second Auto Brightness & Contrast
Auto Start
Signal Mixing
Triple Display & Save
Line Profile
Image Filtering
Annotation Tool
ChamberCam

Why Choose the CX-300?

Full-Size Performance: Sub-3nm resolution and 500,000× magnification for the most demanding analytical work
Large Sample Capability: 100 × 100 mm stage with full rotation and wide tilt range
Intuitive Operation: NanoStation5 GUI minimises training time and maximises productivity
Flexible Vacuum Modes: HV, LV, and VP for conductive and non-conductive samples alike
Broad Expansion Options: EDS (Oxford, Bruker), EBSD, STEM, Coolstage, NanofiberScanner, and more

ELECTRON GUN	Tungsten filament (W)
SPATIAL RESOLUTION	< 3 nm
MAGNIFICATION	9× to 500,000×
ACCELERATING VOLTAGE	1 – 30 kV (1 kV increments)
SAMPLE STAGE	X: 100 mm, Y: 100 mm, Z: 60 mm R: 360°, T: -20° – 90°
DETECTOR	SE, BSE
VACUUM MODE	HV, LV (20 Pa), VP (10 / 20 / 30 Pa)
VACUUM SYSTEM	Turbo pump (300 L) + Rotary pump (100 L)
DIMENSIONS (W × L × H)	640 × 690 × 1,460 mm
WEIGHT	210 kg
FEATURES	Panorama v2 · Auto Focus · 1-Second Auto Brightness & Contrast · Auto Start · Signal Mixing · Triple Display & Save · Line Profile · Image Filtering · Annotation Tool · ChamberCam
DATA OUTPUT FORMAT	JPEG, TIFF, BMP
OPTIONS*	EBSD · STEM · NaviCam · Coolstage LV (20 Pa) · VP (10 / 20 / 30 Pa) NanofiberScanner · Scroll Pump · Air-Protection Module EDS (Oxford, Bruker)